Key Components of a Wafer Handling System | Automation
Explore the essential components of a wafer handling system, including robots, end effectors, and motion control for reliable semiconductor automation.
A reliable wafer handling system is critical for maintaining yield, cleanliness, and process stability in semiconductor manufacturing. Key components such as wafer handling robots, end effectors, precision motion stages, sensors, and controllers work together to ensure accurate, contamination-free wafer transfer between tools. Poor alignment, vibration, or inconsistent motion can directly impact throughput and device quality. Understanding how each component contributes to precision and repeatability helps engineers design automation systems that meet cleanroom and production requirements. This article explains the essential elements of a wafer handling system and how they support efficient semiconductor automation.
Read the full article here: Key Components of a Reliable Wafer Handling System


